Equipment configuration:
The KLA 255X Analysis Station is a powerful data analysis and image storage system. Together with the KLA 2100 Series Defect Inspection Systems and the KLA 2608
Review Station, the KLA 255X Analysis Station forms the KLA Yield Management System. The KLA 255X interfaces with non-KLA inspection and review systems.
The KLA 255X Analysis Station manages defect data found during the inspection of
semiconductor wafers. To do so, it employs a work station with the option for remote