- Equipment configuration：
- The KLA 255X Analysis Station is a powerful data analysis and image storage system. Together with the KLA 2100 Series Defect Inspection Systems and the KLA 2608
- Review Station, the KLA 255X Analysis Station forms the KLA Yield Management System. The KLA 255X interfaces with non-KLA inspection and review systems.
- The KLA 255X Analysis Station manages defect data found during the inspection of
- semiconductor wafers. To do so, it employs a work station with the option for remote