- Equipment configuration：
- The 2138XP inspection systems are instrumental in nearly every modern fab for accelerating technology development and improving process yield. These systems, with their high-resolution brightfield inspection technology, enable accurate and consistent detection of all yield-relevant defect types on all process layers of current-generation devices.
- The KLA 2138XP is a wafer inspection system that incorporates advanced sensor and image processing technologies. The 2138XP enables manufacturers to detect all types of yield-relevant defects on all process layers, with high capture rates, automatically and consistently.
- In-line inspection tools must be able to detect all types of yield-limiting defects, whether handling, tooling, or process. Only complete visual access to all defect types ensures complete determination of yield correlation and implementation of effective yield strategies.
- Productivity improvements include job queuing, an easy-to-use NT user interface and recipe management software. Job queuing improves tool utilization by up to 30% thereby reducing tool idle time. Users can now set up one wafer lot while another lot is running.